Peer-Reviewed Journal Details

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Authors

Brennan, Barry and Qin, Xiaoye and Dong, Hong and Kim, Jiyoung and Wallace, Robert M

Year

2012

Month

January

Journal

Title

In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN

Status

Published

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Volume

101

Issue

21

Start Page

211604

End Page

Abstract

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