Peer-Reviewed Journal Details

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Authors

Dong, H and Brennan, B and Zhernokletov, D and Kim, J and Hinkle, CL and Wallace, RM

Year

2013

Month

January

Journal

Title

In situ study of HfO2 atomic layer deposition on InP (100)

Status

Published

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Volume

102

Issue

17

Start Page

171602

End Page

Abstract

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