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Authors

Qin, Xiaoye and Brennan, Barry and Dong, Hong and Kim, Jiyoung and Hinkle, Christopher L and Wallace, Robert M

Year

2013

Month

January

Journal

Title

In situ atomic layer deposition study of HfO2 growth on NH4OH and atomic hydrogen treated Al0. 25Ga0. 75N

Status

Published

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Volume

113

Issue

Start Page

244102

End Page

Abstract

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