Peer-Reviewed Journal Details

Mandatory Fields

Authors

Dong, H and Brennan, B and Qin, X and Zhernokletov, DM and Hinkle, CL and Kim, J and Wallace, RM

Year

2013

Month

January

Journal

Title

In situ study of atomic layer deposition Al2O3 on GaP (100)

Status

Published

Optional Fields

Search Keyword

Volume

103

Issue

12

Start Page

121604

End Page

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details