Peer-Reviewed Journal Details
Mandatory Fields
Dong, Hong and Santosh, KC and Qin, Xiaoye and Brennan, Barry and McDonnell, Steven and Zhernokletov, Dmitry and Hinkle, Christopher L and Kim, Jiyoung and Cho, Kyeongjie and Wallace, Robert M
2013
January
In situ study of the role of substrate temperature during atomic layer deposition of HfO2 on InP
Published
Optional Fields
114
15
154105
Grant Details