Peer-Reviewed Journal Details
Mandatory Fields
Brennan, B and Milojevic, M and Kim, HC and Hurley, PK and Kim, J and Hughes, G and Wallace, RM
2009
January
Half-Cycle Atomic Layer Deposition Reaction Study Using O3 and H2O Oxidation of Al2O3 on In0.53Ga0.47As
Published
Optional Fields
12
6
H205
Grant Details